Control over high alignment accuracy and high speed of a precision alignment system based on laser moire signals 基于激光莫爾信號精密定位裝置的高速高精度定位控制
The issues involved in meeting this requirement include manufacturing capability , as well as image alignment accuracy and stability 這個(gè)問題涉及要求的滿足,包括制造能力,圖像對齊精度和穩(wěn)定性。
Subsequently the concrete implementation steps of them and some measurements for further improving the alignment accuracy are presented . finally , the alignment results of the isar real data achieved by these methods are shown 然后文中給出了具體實(shí)現(xiàn)這些方法的步驟,以及在這些方法的基礎(chǔ)上,進(jìn)一步提高對準(zhǔn)精度可采取的措施。